Used AJA INTERNATIONAL ATC Orion 8 #293809480 for sale
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ID: 293809480
Vintage: 2011
Sputtering system
Deposition chamber: 15.6" x 14" OD, Vacuum chamber with flange
O-Ring seal
Chamber bottom: 16.5" CF With copper gasket
No substrate heater
(1) Argon Mass Flow Controller (MFC)
(5) DC guns
No RF guns
Target: 3"
RF substrate bias:100W
Chamber body:
CF Viewport with integrated shutter, 6"
Turbopump / Gate valve (8" CF)
Vacuum gauges ((2) 2.75" CF, (1) 1.33" CF)
Substrate holder flange
Vent valve
Load-lock (10" CF)
2.75" CF and 6" CF Ports
(2) Removable stainless steel chamber liners
Integrated instrument rack
Heavy duty caster
Leveling feet and powder-coated table top
Chamber light mounted table top
Hinge for chamber top
Water mainfold with flow sensor
Vacuum pumping:
700 l/s PFEIFFER wide range turbopump with controller
Cables and delayed vent valve
8.2 CFM Alcatel dry
Lobe type backing pump with integral valve
Interconnecting plumbing
(3) DC Supplies
RF Supply
Power: 600 W
Automated 4-Way DC Switch box
Cable set
Vacuum gauge:
GRANVILLE-PHILLIPS 307 Gauge controller
(3) Head outputs with Nude ion gauge, convectron gauge and Baratron gauge heads: 100 mTorr
QUARTZ Crystal thickness monitor:
Single low profile
Crystal sensor
Heat sink
Controller
Oscillator
Cable
(10) Crystals
Substrate holder:
(3) Accommodates, 3"
Continuous motorized rotation: 0 to 40 RPM, Controller
Standard transferable, aluminum, 7" OD x 0.25"
Custom transferable, aluminum, 7" OD x 0.25"
RF/DC Biasing capability
Power supply: 100 W
Gas handling:
Mass flow controlled gas line (Ar): 100 SCCM with pneumatic isolation valve filter
Pressure control / Vacuum valves:
VAT Series 64 Closed loop
Automatic pressure control
Isolation gate valve
Manual vent valve
CF Size: 8"
Load lock:
Low volume aluminium chamber
Single billet
Removable loading door
Magnetic transfer arm with custom susceptor
Full range vacuum gauge
Wide range: PFEIFFER 80 Litres p/s
Compound turbomolecular pump with delayed vent
TMP Controller
Interconnecting plumbing
(4) CFM Alcatel mechanical backing pumps
Isolation gate valve: 10" CF
Main chamber with load-lock adaptor flange
2011 vintage.
AJA INTERNATIONAL ATC Orion 8 is a cutting-edge sputtering equipment that represents a significant advancement in thin film deposition technology. This versatile system is designed to meet the demands of research and industrial applications requiring high precision and control over thin film deposition processes. The unit boasts a range of innovative features and capabilities that make it a preferred choice for researchers and engineers working in various fields such as microelectronics, optics, and material science. One of the key features of ATC Orion 8 is its advanced magnetron sputtering technology, which enables precise and uniform deposition of thin films on substrates. The machine utilizes magnetron sputtering sources to ionize gas atoms and deposit them onto the substrate surface, allowing for the creation of thin films with exceptional thickness control and uniformity. This technology ensures high deposition rates and excellent film quality, making AJA INTERNATIONAL ATC Orion 8 ideal for a wide range of applications that require high-performance thin films. ATC Orion 8 is equipped with up to eight sputtering sources, providing users with the flexibility to deposit multiple material layers and create complex thin film structures. The tool offers a wide range of target materials, including metals, alloys, and oxides, allowing users to customize the deposition process according to their specific requirements. Additionally, the asset features a rotating substrate holder, enabling deposition on a large area with uniform film thickness distribution. In terms of control and monitoring capabilities, AJA INTERNATIONAL ATC Orion 8 is equipped with a user-friendly interface that allows for easy operation and real-time monitoring of the deposition process. The model is equipped with advanced process control software that enables users to precisely adjust deposition parameters such as gas flow, power levels, and deposition time to achieve the desired film properties. Furthermore, the equipment is equipped with in-situ diagnostics tools that allow for real-time monitoring of the film growth and thickness, ensuring high reproducibility and consistent film quality. ATC Orion 8 is designed with scalability in mind, allowing users to upgrade the system with additional features and capabilities to meet evolving research and production requirements. The unit is built with high-quality components and materials to ensure long-term reliability and performance consistency. Additionally, the machine features a compact footprint, making it suitable for laboratory environments with limited space. Overall, AJA INTERNATIONAL ATC Orion 8 sputtering tool is a state-of-the-art solution for thin film deposition applications that require high precision, flexibility, and reliability. With its advanced magnetron sputtering technology, multiple sputtering sources, and user-friendly interface, ATC Orion 8 offers researchers and engineers a powerful tool for exploring new thin film materials and structures. Whether in academia or industry, AJA INTERNATIONAL ATC Orion 8 is a trusted choice for those seeking to advance their thin film deposition capabilities.
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