Used AJA Orion 5 #293817160 for sale
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ID: 293817160
Wafer Size: 4"
Sputtering chamber, 4"
(5) Confocal sputtering guns
(3) 700-Watt Direct Current (DC) power supplies
(2) 300-Watt Radio Frequency (RF) power supplies and matching networks
(1) 50-Watt Radio Frequency (RF) power supply and matching network for substrate etch
Load lock
Rotating platen.
AJA Orion 5 is a sputtering equipment designed for a variety of thin film technology processes. It enables users to create transparent oxide, nitride and metal-dielectric films for advanced PV, displays, touch screens and microelectronic devices. The system incorporates a five-chamber vacuum sputtering unit, enabling users to create high-precision film layers with optimized thicknesses. The five-chamber feature allows different sputter configurations to be used, providing flexibility for various application requirements. The machine includes an automated six-axis, or X,Y,Z, roll, tilt and rotational robot chamber for exact positioning of the sputtering target. This allows precise control of the sputter distribution and geometric parameters. The hood design also provides an adjustable magnetic field, which helps with the uniform deposition rate over the substrate. Orion 5 offers a range of sputtering targets for a variety of different materials such as aluminum, silicon, chrome, gold and other compounds for different performance. It also offers direct deposition of sputtered particles on multiple substrates without additional deposition techniques. This tool is user-friendly and allows users to monitor process status, as well as monitor parameters such as pressure, temperature, gas flow, sputter current and time. It also features safety features such as automatic venting of the chamber and gas bottle connections. AJA Orion 5 also includes powerful software, allowing users to control the sputtering parameters such as pressure, voltage, current, temperature, deposition pressure, and substrate size. The software also provides data analysis capabilities such as thickness and uniformity information, as well as other film characteristics, which can be used to optimize the process. Overall, Orion 5 is an advanced sputtering asset that offers flexibility, reliability, and precision in a user-friendly package. Through its five-chamber design, multiple sputtering targets, and powerful software capabilities, it is capable of producing quality thin films for advanced technology processes.
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