Used ALCATEL / ADIXEN / PFEIFFER SCM 600 #9192498 for sale
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ID: 9192498
Pump
(3) Sputter up cathodes size: 8"
Load lock
Process gas supply: MFC, (3) lines
HUTTINGER RF Generator: 13.5 6 MHz, 1.2 kW
Impedance matching network.
ALCATEL / ADIXEN / PFEIFFER SCM 600 is a powerful sputtering equipment used to deposit thin-film materials onto substrates. This versatile system is highly adaptable, allowing users to customize it for any given application, be it for the creation of metallic coatings on plastic models or for the production of integrated circuits. The unit consists of a three-target sputtering chamber, powered by a high-power DC magnetron source. The sources are connected to the chamber by shielded cables, and the samples to be sputter-coated are then mounted onto the sputter holder inside the chamber. An integrated vacuum machine maintains the chamber pressure at the optimal level for film deposition. The primary component of the tool is its robust, high-precision particle-beam source. It produces highly uniform and controllable ion beams which can be freely adjusted for any desired deposition rate or composition. The source has an excellent accuracy range and incorporates several features that promote reliable and precise operation. This makes it suitable for a wide variety of material-deposition tasks. ADIXEN SCM 600 also has a gas-introduction asset, which enables users to apply reactive gases during the deposition process to form adhesive or hard coatings. It includes a comprehensive range of programmable recipes, allowing users to repeat any sputtering process with ease. The model can handle samples up to a maximum size of 400mm x 250mm, and offers the choice of several films, including chromium, tungsten, aluminium, copper and gold. In addition to its sputtering capabilities, ALCATEL SCM 600 provides several options for users to monitor and review the performance of the equipment. It includes a graphical user interface (GUI) that shows the deposition rate and the temperature and pressure inside the chamber at any given point in time. The GUI also displays system diagnostics and alarms to alert when any parameter goes out of its specified range. In conclusion, SCM 600 is a reliable and versatile sputtering unit that is suitable for a wide range of thin-film deposition applications. Its particle-beam source is capable of delivering consistently uniform films, while its GUI allows users to monitor and control the deposition process with ease.
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