Used AMAT / APPLIED MATERIALS 1200L #9379482 for sale
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ID: 9379482
Sputtering system
Target: ITO / SiO2
(3) ORELIKIN LEYBOLD VACCUM / WSU 2001H Dry pumps
(3) STERLING FLUID SYSTEM
(18) SHIMADZU / TMP-1503LM Turbo pump
(2) Air tanks
2019 vintage.
AKT/AMAT / APPLIED MATERIALS / AKT 1200L is a high-precision sputtering equipment, designed for use in a wide range of material deposition applications. The system uses a multi-source, multi-magnetron configuration, with each magnetron independently adjustable for optimal process control. AKT 1200L unit is built around a multi-stage sequential source/target table mechanism, which allows for precise, repeatable positioning of the targets relative to the sources. This makes it possible to precisely sputter uniform layers from multiple sources. The source/target table can also be configured for angle sputtering, allowing for the deposition of complex shapes and structures. AMAT 1200L machine is equipped with a static, EMI shielded control cabinet, and a programmable logic controller (PLC). The PLC is used to control the tool process, including cycling of the sources, and the power level of each source. The EMI shield facilitates precise measurements and constant monitoring of the process parameters, such as sputtering pressure, Argon flow, RF power, and more. 1200L also features an advanced, low vibration, magnetic suspension technology, which minimizes vibration and improves uniform deposition. This is accomplished by suspending the source/target table by attractive forces, generated by an array of small permanent magnets. When coupled with the asset's state-of-the-art automation, APPLIED MATERIALS 1200L can be used to deposit aluminum, copper, chrome, tungsten, titanium, and other alloys, as well as oxides of these materials. The model is available in several versions, to meet specific application requirements. Overall, AMAT/AMAT / APPLIED MATERIALS / AKT 1200L is an excellent equipment for high-precision sputtering applications. Its multi-source, multi-magnetron system allows for uniform layer deposition, and its advanced automation ensures consistent process control. Its magnetic suspension technology minimizes vibration, and its low EMI ensures precise measurements. In short, AKT 1200L is an ideal choice for a wide variety of material deposition.
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