Used ANATECH / TECHNICS Hummer V-A #159053 for sale
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ID: 159053
Sputtering system, with CEA II
Includes: APD Cryogenics, DE202, expander module.
ANATECH / TECHNICS Hummer V-A sputtering equipment is an advanced device for physical vapor deposition (PVD) of thin films. It is an advanced deposition technique that combines the high uniformity of magnetron sputtering with the flexibility of arc evaporation. The sputtering system has a power of up to 40 kW and is therefore suitable for many different applications. It is comprisd of a DC pulsed-power supply and a PVD chamber. The power supply is equipped with a graphical user interface that allows the user to set and monitor the unit parameters. The PVD chamber has a rectangular or round target holder with a robotic arm to hold the target. It is vacuum-sealed so that it can be operated under high vacuum or low pressure conditions. The chamber also features insulated substrate holders and a gas injection machine. ANATECH Hummer V-A tool has a high degree of repeatability and reproducibility. It uses DC sputtering to deposit films with excellent uniformity and consistent layer composition. The asset is also highly automated and can be used with a variety of materials including metals, oxides, and other films. It has an e-gun which is ideal for EVA processes because it can be easily adjusted for different materials. The model also includes a cooling equipment which is specially designed to promote cooling of the target and substrate. The cooling system consists of a set of cooling coils that cool the target, substrate, and parts of the chamber. The cooling unit helps to improve the quality of the deposited films by reducing thermal stress. TECHNICS Hummer V-A machine can also be used in tandem with other sputtering equipment, such as cluster tools. The combination of these devices helps to increase process flexibility and reduce cycle times. In addition, the tool is equipped with safety features such as an electronic interlock asset that prevents accidental discharge of the high-power source. Overall, theANATECHHummer V-A sputtering model is a robust and reliable device for physical vapor deposition. It is a versatile equipment that can be used in a wide range of applications and offers excellent performance in terms of uniformity and repeatability. Its automated nature makes it easy to use and it is equipped with safety features to ensure that operations are carried out in a safe manner.
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