Used ANELVA C-3941L-T #293760115 for sale

DC Pulse magnetron sputtering system (11) Chambers (6) Doors In-line type Tact time: 2 min Non-uniformity: Within ±5% (16) Cathode numbers (6" x 28": 12pcs, 10" x 28": 4pcs) Lamp heating and deposition shield Sequencer Remote I/O Monitor Keyboard (39) Tray sets (26) Rail units Tray return mechanism: Unloading return unit Straight return unit Twin shuttle unit Capability: Size: 550 mm x 650 mm Sheet quantities: 60 Sheets / hour and 1440 Sheets / day Size: 400mm × 550mm Sheet quantities: 120 Sheets / hour and 2880 Sheets / day Heater: Temperature distribution: 200°±5% (10°C) Maximum temperature: 250°C Exhaust system: Load lock: (2) KASHIYAMA Dry pump (2) SHIBAURA Root blower pump Sub load lock: OSAKA TMP Vacuum Buffer 1, 2: (4) TMP Units Baking 1, 2: (4) TMP Units Sub unload lock: TMP Unit Unload lock: (2) TMP Units Root blower pump Gas / Line / SCCM Ar / 1 / 500 SCCM O2 / 1 / 100 SCCM N2 / 2 / 500, 100 SCCM Utility: Electricity: 3Φ, 200 V (approximately 1500 A) Gas: Ar, O2, N2 Coolant: Below 29°C, 2-5 Kg/cm³, 92 L/min Power supply: DC Pulse: (5) 20 kW, 12 kW (4) PDC-609: 12 kW (6 kW x 2) (6) ADVANCED ENERGY 10K-PEII.