Used APPLIED VISION ARx10 #9358080 for sale
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ID: 9358080
Vintage: 1995
Sputtering system
With pure Zirconium and Silicon targets
(10) IST Lenses
Power supply:
3x110 V, 3 Phase (Main supply)
220 - 240 V, Single phase
1995 vintage
.
APPLIED VISION ARx10 is a sputtering equipment specifically designed for research and development purposes. It features a combination of single and dual power sources, allowing for versatile sputtering applications. The configuration of the system is designed to enable the efficient processing of various substrates, such as glass, metals, and semiconductor materials. ARx10 has a maximum RF power of 10kW, distance range of 90mm-200mm, and a working envelope of 500mm (x)-325mm (y)-150mm (z) to accommodate substrates of different sizes. The torque power section uses three stepper motors to control theta and phi for precise control over sputtering angle. It features a high-vacuum chamber surrounded by two lift pumps, a turbo pump, and one mechanical pump. An independent differential pumping unit allows sputter deposition on substrates at different pressure ranges for varying sputtering application conditions. An automated substrate handling machine offers the user comprehensive control over the sputtering process. The advanced control features allow the user to monitor and modify parameters such as gas flow, angle of incidence, and beam power during sputtering. The chamber's temperature is maintained at a constant level by an active temperature regulation tool. Additionally, the asset is equipped with a motorised robotic arm to facilitate sample transfer. APPLIED VISION ARx10 utilizes a range of sputtering techniques, including unbalance sputtering, shadow-mask sputtering, contact sputtering, and co-sputtering, to enable the efficient and precise deposition of a variety of thin films with superior adhesion properties. The model also features a magnetic media changeport equipment which allows for quick and easy media and substrate exchange. The compact size and flexible design of the system make it ideal for use in the laboratory or production setting. With its intuitive user interface, comprehensive control features, and efficient media handling unit, ARx10 provides a comprehensive solution for sputtering applications.
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