Used BALZERS 450 #170848 for sale

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Manufacturer
BALZERS
Model
450
ID: 170848
Wafer Size: 3"-4"
Sputtering system, 3"-4" Process: large targets (~9"x5") in a sideways-sputter configuration Targets sputter inward onto a rotating drum. Pallets: 3" and 4" wafers. Drum: Raises vertically out of the top of the chamber Hydraulic lift: Failure, but using an external hoist to open the chamber (3) Target slots: Aluminum, Tungsten, Silicon, Fourth slot is currently set up to perform an RF etch of the substrates and drum System has never seen any gold or photoresist inside the chamber Process gas: Argon Vent gas: Nitrogen Cryo pump: base pressure of ~5e-7 torr. (~8 hours to pump out) (2) Power supplies RGA: 1-100 AMU Software PC: Windows 98 Currently installed in a fab.
BALZERS 450 is a sputtering equipment manufactured by Leybold Optics, a world-leading manufacturer of optical components and systems. The system is designed to be used in a variety of industrial, scientific and research applications, including the production of highly conductive coatings on surfaces subjected to corrosion, abrasion and other environmental factors. 450 is made up of several components, including a sputtering chamber, a pumping station and a deposition unit. The sputtering chamber has a volume of four hundred fifty liters and is constructed from stainless steel material with molybdenum and platinum coated surfaces. The walls of the chamber are lined with removable reflectors and retaining frames for vacuum seals. This provides uniform sputtering and a high degree of repeatability with good process optimization. The chamber also incorporates a rotating target and an adjustable lift height which can be used to adjust deposition parameters without replacing the target. The pumping station includes an oil-sealed rotary vane pump, a mechanical booster and high vacuum pumps. This ensures excellent high performance with a pumping capacity of up to ninety-six cubic meters per hour and a normal operating pressure of up to one milliTorr. The deposition machine, on the other hand, is designed to sputter the target material onto the substrate at a controlled rate. This is achieved through the use of a collimator and a target shutter to focus the sputtering ion beams, as well as a gas flow tool to ensure perfect stoichiometry of the material being deposited. BALZERS 450 sputtering asset provides a broad range of deposition processes from high density optical to fine-grain textured surfaces. It also offers an automated process control model with optional real time monitoring, which allows for a consistent product quality with lower process costs. Furthermore, its engineered components provide a reliable performance resulting in greater process repeatability and profitability. 450 is a safe and reliable equipment designed to meet the requirements of demanding industrial, scientific and research applications.
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