Used BALZERS Circulus M 95/12 #9137154 for sale
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ID: 9137154
Sputtering systems
Turbo pump control cabinet
Pinnacle control cabinet
C-Gun control cabinet
Transformer
Handling system
POLYCOLD Cryopump
Touch screen coating machine:
Single plate static coating system
(12) Cavities
(10) Coating chambers
(2) Material cavities
Magnetic disk coating machine:
Double-sided vacuum coating
Magnetic materials to 130mm, 95mm, 84mm or 65mm
Aluminum alloy / Glass disk substrate.
BALZERS Circulus M 95/12 is a sophisticated yet easy-to-operate sputtering equipment used for depositing thin films for a variety of applications. This system features a highly precise will-less electromagnetic generator capable of sputtering at energies up to 95 keV and a magnetic field adjustable up to 12 Tesla, which enables users to define exactly the deposition parameters needed for their process. The generator is connected to a rotatable cathode that can be turned for an improved homogenization of the sputtered material on the substrate. Selective sputtering can further be enhanced by the optional use of additional electrodes mounted around the cathode. The unit is designed for high production throughput and boasts a maximum substrate size of 200 by 200 mm with a circularly shaped aperture up to 12.5 cm in diameter. It is fitted with a high capacity capacity Gas Flow Controller (GFC) machine with independent gas and pressure control, allowing for very precise sputtering process control. This tool also offers high precision voltage scan capabilities and offers variable temperature and power modulations through its optional autodeposition kit, further improving the homogeneity on the substrates. BALZERS Circulus M 95/12 is suitable for a wide range of sputtering applications, including magnetic recording media, thin film transistors, capacitors, high-end optics, and MEMS devices. This asset is highly reliable and robust, backed by a 24-month parts and labour warranty and is certified to comply with CE and UL standards. With its user-friendly interface, digital control centre, and automated event logging capabilities, BALZERS Circulus M 95/12 is an ideal machine for research, prototyping, and production sputtering applications.
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