Used BALZERS LLS 801 #293795371 for sale
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ID: 293795371
Wafer Size: 6"
Vintage: 1988
Sputtering system, 6"
POLYCOLD Cryopump
Vacuum pump
1988 vintage.
BALZERS LLS 801 is a sputtering equipment that offers high-level performance combined with excellent ease-of-use and reliability. This system is designed to facilitate production of complex devices with high-level quality and yield. The carefully designed chamber design promotes efficient sputtering and maximum uptime. Balanced ion sources have been integrated into the vacuum chamber in order to achieve precise directions and uniformity of magnetic lines of force, greatly enhancing repeatable physical and electrical properties on the film surface. This allows for high reproducibility of the sputtering results. The dual ion source allows for the use of both reactive and non-reactive sputtering processes. This is especially beneficial when depositing complex film systems which require precise control over the composition and rate of deposition. The unit also provides the flexibility of operating in the batch, in-line, and automated production processes. The robust power supply unit provides excellent voltage, current and wattage control, as well as precise process control. Heating elements are located within the chamber walls to ensure precise temperatures for each film deposition step. This ensures precise film characteristics with minimal thickness variation and highest repeatability. The precise automation offered by LLS 801 is also notable. Manual sputtering systems require frequent chamber cleaning and multiple sputtering steps, which can dramatically reduce throughput. The automated deposition processes, however, not only allow for easy parameter changing and higher throughput, but also reduce contamination and process times. BALZERS LLS 801 provides the best of both worlds when it comes to sputtering production. It offers precise Automation, top-of-the-line performance, and excellent reliability and ease-of-use. This machine is perfect for any production process requiring precise physical, electrical and/or optical properties, and complex deposition process control.
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