Used BALZERS LLS 801 #9199165 for sale

BALZERS LLS 801 sputtering equipment is a versatile tool designed to provide an efficient and precise deposition of thin films with high sputter rates. The system is equipped with a three-pocket turret, allowing for deposition of up to three materials at a time with different sputter rates, leading to homogeneous thin film deposition. Its high capacity load-lock unit allows for rapid installation and removal of substrates, providing improved efficiency. The machine is further enhanced with a large working chamber, allowing for up to four substrates of maximum 180 mm in diameter to be processed. LLS 801 features a modular design, allowing for a wide range of configurations to meet specific needs. It utilizes a three stage turbo vacuum pump to achieve a base pressure of 7x10-8 mbar. The tool is fitted with an 85 MHz RF power supply, allowing for ultra-high power levels of up to 800W for optimal film quality and sputter rate. An optional Pulse Power Supply can also be utilized for higher deposition rates. BALZERS LLS 801 utilizes an automated microwave substrate heating module, allowing for precise homogeneous heating up to 400°C. This process is further enhanced with a turbulence generator that aids in preventing nodules and ensuring even target use. Alteration of the sputtering mode is possible due to the incorporation of a Circle Sweep Magnetic Confinement and an Open Flux Exception that helps reduce particle repulsion and improve the linearity of quality and film coverage. LLS 801 is a versatile and sophisticated sputtering asset that can produce efficient and precise deposit of thin films with desired properties. Its modular design, multiple configurations, and enhanced features allow for it to meet the needs for a variety of applications. With its automated microwave substrate heating module, efficient load-lock model, and ultra-high power levels, BALZERS LLS 801 is an ideal solution for thin film depositions.