Used BALZERS LLS 802 #293752557 for sale
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ID: 293752557
Vintage: 1994
Load lock sputtering system
CTI-CRYOGENICS 9600 / 9700 Compressors
VARIAN 600DS Scroll pump
Water pressure: 4-7 Bar
Air pressure: 6-8 Bar
N2 Regular pressure: 2.5-5.0 Bar
N2 Process pressure: 0.5-1.0 Bar
N2 Vent pressure: 0.2-0.5 Bar
Argon pressure: 0.5-1.0 Bar
Power supply: 3 x 400/230 VAC, 60Hz, 60A, 3 Phase + N + E (Transformer supplied)
1994 vintage.
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