Used BALZERS LLS 802 #293813030 for sale

BALZERS LLS 802
Manufacturer
BALZERS
Model
LLS 802
ID: 293813030
Wafer Size: 6"
Physical Vapor Deposition (PVD) system, 6".
BALZERS LLS 802 is an advanced sputtering tool designed for industrial-scale production. The equipment utilizes a low power RF generator to expose materials to an electron beam that is then deposited onto a substrate. This sputtering system has a chamber size of 800 mm x 400 mm and provides highly uniform, defect-free film deposition over large areas. It also offers a wide range of deposition parameters such as temperature and output power. LLS 802 unit is ideal for the sputtering of a variety of thin-film materials. It can deposit thin films such as aluminum, gold, nickel, copper and titanium. The machine also includes a central gate for sputter cleaning of the substrates, as well as substrate holder, gas injectors and high frequency ground connections. The tool can be used for the sputtering of a variety of thin films such as thin-film transistors, electronic components, and thin-film batteries. The asset also offers flexibility when it comes to coatings, as the model can be tailored to any film that needs to be applied by changing the electrical properties. The equipment can be used to apply dielectric, conductor and semi-conductor films, as well as adhesion layers, diffusion barriers, oxidation layers, and film on curved surfaces. BALZERS LLS 802 is also equipped with a belt-driven substrate transporter and a vacuum chamber with a small base pressure of 1.3 * 10-3 mbar. This enables a high quality sputtering process in a controlled environment. The system also offers a range of temperature control options from 25°C to 400°C, allowing for a variety of deposition processes. LLS 802 sputtering unit is built for reliability and efficient process control. It includes a number of safety features such as an automated door interlock, emergency stop and emergency shut-off valves. The machine also offers an easy to use graphical user interface (GUI) for process automation, data acquisition and report generation. BALZERS LLS 802 is an ideal tool for the sputtering of thin film layers in industrial production. Its various features and cutting-edge technologies allow it to meet the highest standards of film deposition. It is designed to provide users with high uniformity, good reproducibility, defect-free layers, and efficient process control.
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