Used BALZERS LLS 802 #9313125 for sale
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ID: 9313125
Vintage: 1994
Load lock sputter system
Control and distribution racks
VARIAN 600DS Scroll pump
(2) Cryo compressors and line transformer
CTI-CRYOGENICS 9600 / 9700 Cryo compressor
Spare parts
Pressure:
Water: 4-7 Bars
Air: 6-8 Bars
N2 Regular: 2.5-5.0 Bars
N2 Process: 0.5-1.0 Bars
N2 Vent: 0.2-0.5 Bars
Argon: 0.5-1.0 Bars
Voltage: (3) 400 / 230 VAC, 60 A, 60 Hz, 3 Phase+N+E (Transformer supplied)
1994 vintage.
BALZERS LLS 802 is a state-of-the-art sputtering equipment designed to provide advanced, efficient deposition processes for a wide range of sputtering applications. This device is capable of using up to 8 different sputtering targets, allowing for multilayer deposits of up to 8 different materials. It also has high process reliability due to its advanced power supply technology, ensuring stable, high-performance sputtering processes. LLS 802 has a sputter rate that can be adjusted from 0.1 microns per hour up to 0.2 microns per hour, with outstanding uniformity and deposition rate stability, along with a uniformity of >98% for most applications. This maximizes the efficiency of sputtering processes for a wide range of applications, from thin magnetic films to large area displays. The system has unique automation capabilities, with a fully automated load lock that can be used for multiple processes, and optional computer-controlled automatic end point detection for precision control of the end points of the sputtering process. It also has remote control capabilities, allowing television monitoring during process progress. The unit is thermally stable, which ensures the uniformity of temperature on its surface, thus giving a uniformity of the deposit process. BALZERS also has an inert gas supply which can be used for sputter etching and sputter deposition at lower temperatures. In addition, its load lock has a temperature range from 20°C to 1000°C, allowing for precise control of sputtering conditions and process stability. Furthermore, the machine has powerful software, allowing for precise operator control of sputter parameters, enhanced in-situ process monitoring, and the automation of multiple processes and end point control. Its built-in Vacuum Inverter Technology allows for quick down times, as well as the ability to maintain and control the high vacuum necessary for sputter processing. Overall, BALZERS LLS 802 is a powerful and reliable device with an extensive feature set which makes it perfectly suited for many types of sputtering applications. It offers a high degree of process control and accuracy, along with sophisticated automation capabilities and powerful software, thus improving the efficiency of deposition processes and ensuring reliable sputter processes.
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