Used BALZERS SCD 040 #48452 for sale

BALZERS SCD 040 is a high-performance sputtering equipment designed for precision thin film deposition. The platform is equipped with five process chambers, two main deposition chambers, two bottom heating and cooling systems (thermal systems), an open-air cooling chamber, and a high resolution flat substrate table. These chambers can be used for physical vapor deposition (PVD), chemical vapor deposition (CVD), and thermal evaporation techniques for metal and dielectric film deposition. The system also offers the ability to perform laser ablation and low temperature plasma-enhanced deposition. The main deposition chambers feature magnetrons placed in a rotatable support. This allows for a much greater sputtering rate, as well as the ability to instantly transfer the target material from one chamber to another without the risk of contamination. The bottom heating and cooling systems incorporate a resistive type heat source with precision temperature control for accurate heating and cooling rates. This unit is able to handle large, thick substrates and is ideal for achieving uniform temperature uniformity of up to ±0.2 °C. The internal cooling machine can easily maintain the ideal temperature range inside the chambers. SCD 040's open-air cooling chamber is equipped with a high-sensitivity thermocouple to detect a sudden temperature change inside the chamber. The tool also features a high resolution flat substrate table that is designed to ensure parallelism in both spatial directions to within ±1.5μm. This table is coupled with a proprietary tool-less substrate chucking technique that greatly reduces the time needed to attach a substrate before the start of a deposition process. The asset also offers multiple configuration options for coating materials, such as titanium, alumina, and titanium nitride for example. It also comes with a patented stereo-imaging mass spectrometer which enables in-line, real-time, multiple point plasma density analysis for controlling quality and performance in the deposition process. Finally, BALZERS SCD 040 is designed to be remotely controllable and field serviceable, allowing for direct communication and configuration from any remote location. This makes it perfect for research and development, as well as industrial and analytics applications.