Used BALZERS / UNAXIS LLS 900 #9006623 for sale

BALZERS / UNAXIS LLS 900 Sputtering Equipment is an industrial-grade vacuum sputtering machine that is designed for use in semiconductor and other advanced nanotechnology applications. UNAXIS LLS 900 is a modular, multi-chamber, multi-position sputtering system equipped with four 4-target sputtering sources. Each of the four chambers can operate independent of the other. This unit is suited for a variety of deposition processes, including sequential sputtering, simultaneous sputtering, and simultaneous hybrid processes. The main chamber of BALZERS LLS 900 is constructed using high quality stainless steel and high vacuum feedthroughs to ensure a clean, consistent, and long-lasting operation. Its internal dimensions are 18" x 18" x 24" (460mm x 460mm x 610mm). The chamber volume is approximately 12 cubic feet (340 liters) and the base pressure in the vacuum chamber is 10-7 Torr (1.3e-6 Pa). The large working area of the main chamber is augmented by up to four additional external chambers, each containing a 4-target sputtering source. LLS 900 is equipped with the latest in sputtering machine technology. It has integrated closed loop control systems, features a high reliability power supply tool, and utilizes sophisticated metrology techniques for precise process control. Each of the 4-target sputtering sources is composed of four magnetron or diode magnetron sputter sources arranged on a rotating head to provide excellent deposition uniformity. For added convenience, the targets can be changed automatically or manually within the magnetron/diode sputter head. BALZERS / UNAXIS LLS 900 is also compatible with a wide range of process materials, including metals, ceramics, alloys, oxides, and nitrides. The versatility and flexibility of the asset make it suitable for applications in semiconductor fabrication, thin-film device fabrication, industrial coating, and more. This model is designed to meet the most demanding production requirements and is available with extended warranties to provide superior performance and reliability over time.