Used CANON / ANELVA 1060 #9155414 for sale

CANON / ANELVA 1060
ID: 9155414
Wafer Size: 6"
Vintage: 1996
PVD System, 6" Process: Ti / TiN / Wsi 1996 vintage.
CANON / ANELVA 1060 is a sputtering equipment used for thin-film deposition. CANON 1060 is an impulse sputtering system capable of reactive sputtering and can handle both large and small substrates up to 8 inches in diameter. ANELVA 1060 can operate at magnetic as well as conventional power, and provides stable exclusive etching and film deposition over a wide range of energy levels with superior repeatability. 1060 uses a DC-power supply, which is reliable and efficient, and can maintain a constant voltage regardless of the power supply or the substrate size. This means that CANON / ANELVA 1060 can be easily adjusted to meet the desired deposition conditions. CANON 1060 is also equipped with a pressure-measuring unit and a gas flow-control machine, which enable precise pressure and gas flow inputs. This allows for accurate control of sputtering parameters such as film density, uniformity, and gap between deposited layers. ANELVA 1060 also has a unique plasma confinement tool that provides improved uniformity of deposition over a large surface area. This asset employs magnets to create magnetic fields within the vacuum chamber, which are used to control the plasma and provide a uniform ion density. Additionally, 1060 is capable of a range of different operating modes, such as low pressure, high pressure, and mono/multi-frequency sputtering. This allows for flexibility in the deposition process, allowing for a wide range of applications across various industries. CANON / ANELVA 1060 is also equipped with environmental sensors, which can monitor the ambient temperature of the chamber and also test for unwanted emissions. Additionally, CANON 1060 is designed to ensure a clean and safe operation by monitoring and maintaining a safe environment inside the chamber. Overall, ANELVA 1060 is an advanced and reliable sputtering model that offers consistent and uniform deposition across a wide range of substrates. Its ability to output a range of operating modes enables a wide range of applications, while its environmental monitoring equipment means 1060 can be operated in a safe and secure environment.
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