Used CANON / ANELVA C-7010 #9379072 for sale

CANON / ANELVA C-7010 is a high-end sputtering equipment designed for use in thin film production. The system utilizes cathodic arc evaporation and magnetron sputtering techniques to deposit coatings onto substrates such as ceramics, metals, and semiconductors. CANON C-7010 is capable of uniformly applying the specified materials to substrates in a range of thicknesses, with many of the critical parameters of the evaporation process capable of being adjusted. The unit utilizes a standard Turbocuspision Cathodic Arc Source, capable of providing sharp biases and very high deposition rates. An advanced presputtering machine is included for improved uniformity and reduced arcing incidents during the deposition process. The substrate heating source is a ceramic infrared radiator, and can heat up to 500°C, allowing for processes such as high temperature deposition and rapid thermal annealing. Additional features available with the tool includes Auto Film Thickness Monitor, an automated feature that allows it to compensate for differences in substrate size and thickness, and a backside sputtering source for depositing films on both sides of the substrate. The asset is also capable of substrate manipulation to allow for complex substrate shapes and sizes. ANELVA C-7010 also includes a highly advanced control software package, giving the user PLC and SCADA level functionality for job setup, operational monitoring, and data logging. The included tight-loop chamber control software helps to protect the model from wear and tear, and ensures that the film deposition process is both effective and repeatable. Finally, C-7010 also includes safety features such as emergency stop, as well as an emergency exhaust equipment for efficient air purification. The system has been certified for advanced cleanroom standards, and is tested regularly for compatibility with existing cleanroom protocols.