Used CANON / ANELVA C-7100GT #9293803 for sale
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ID: 9293803
Wafer Size: 12"
Vintage: 2006
System, 12"
CANON / ANELVA xT
(2) PVD Chambers
2006 vintage.
CANON / ANELVA C-7100GT Sputtering Equipment is an advanced production tool that can be used for multiple sputtering applications. It is a high-performance, economical sputtering system designed to deposit metal and dielectric films onto a variety of substrates. CANON C-7100GT is equipped with an Electron Cyclotron Resonance (ECR) source, which enables faster deposition than standard sputtering processes, as well as improved film uniformity and higher deposition rates. ANELVA C-7100GT is a four-chamber unit that consists of four sputtering source chambers placed within a single Vacuum Chamber. Each sputtering source chamber is designed to produce a highly uniform target material layer for surfaces that need to be coated with a homogeneous film. It also has a large target area that accommodates large substrates of up to 200 mm in size. It includes a high-precision X-Y motion machine, which allow a high degree of fine-tuning during the sputtering process, and an automated environmental control tool that helps manage and maintain a stable process environment. C-7100GT is capable of producing a wide variety of vacuum deposition films by utilizing various sputtering gases, such as argon, krypton, and xenon. It uses a high-frequency ECR generator to sustain high deposition rates at low temperatures, which results in improved coating uniformity. In addition, its large temperature control range makes CANON / ANELVA C-7100GT ideal for specialized applications such as very thin film deposition and specialty coating. The asset also features a number of safety features, such as a fail-safe shutdown model, an on-board data logging equipment, and an operating temperature and pressure control system. Overall, CANON C-7100GT Sputtering Unit is a reliable and highly efficient tool for sputtering applications. With its ECR source, high deposition rate, large target area, and wide temperature range, the machine is ideal for producing metal and dielectric films for product surfaces and components. It's an economical choice that is perfect for both long-term, high-volume production and specialty coating applications.
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