Used CANON / ANELVA E-800S #293830303 for sale

CANON / ANELVA E-800S sputtering equipment is a state-of-the-art thin film deposition tool designed for use in a variety of production and research applications. This system utilizes an automated, sealed-off chamber design with up to eight load locks for quick substrate loading. This unit is capable of using the most advanced sputtering techniques available, including ion assisted sputtering, high-density magnetron sputtering, reactive sputtering and pulsed-dc sputtering. CANON E-800S features two main sputtering systems, a 24-channel resistive source and an 18-channel high density magnetron source. Both sources can be equipped with different target materials depending on the deposition desired and can be used in combination for even more complex film architectures. Double and triple ion assisted sputtering is also featured on ANELVA E-800S, which utilizes two or three ion sources working simultaneously to increase the energy of the impinging ions, reduce substrate charging, and increase deposition uniformity. This feature also allows for almost any material to be deposited at the highest quality, including difficult to deposit substrates, such as diamond and silica-based materials. In addition, E-800S features a low HiPIMS (High Power Impulse Magnetron Sputtering) mode, which doubles the deposition rate while maintaining the same high-quality thin films. Other options on this machine include a hand-loadable source and argon, hydrogen or nitrogen gas capacitively coupled plasma sources. These alternative deposition techniques can provide high deposition rates with low adhesion and excellent uniformity. CANON / ANELVA E-800S is equipped with advanced computer tools, including an intuitive touch screen interface and real-time data acquisition for comprehensive process and tool performance monitoring. The asset also features automatic process control and automated calibration of the chamber parameters. The open, user-friendly software makes it easy to store, process, and generate recipes. As an added safety feature, the model includes an optional interlock switch, which prevents accidental activation of the sources when the chamber is opened. Overall, CANON E-800S is a highly advanced sputtering equipment capable of providing extremely uniform and reliable thin film deposition. With a range of automated features combined with multiple sources, this system can be used for the most challenging deposition requirements. Whether for research or industrial production, ANELVA E-800S is a reliable and efficient tool for thin film deposition.