Used CANON / ANELVA I-1060 SVII Plus 1 #9171868 for sale

CANON / ANELVA I-1060 SVII Plus 1 is a single-chamber, high-vacuum sputtering equipment designed to deposit thin films onto substrates for advanced microelectronics and optical applications. The unit has a base pressure of 2x10-6 Torr, achieved by means of an active-stage turbomolecular pump. The maximum sputtering power provided by the I-1060 is 5kW and it has an adjustable power range of 0-10%, making it suitable for a variety of applications. An isolated tube mounted on the rear of the unit provides additional power for magnetron sputtering. In addition, the I-1060 features a high-vacuum shutter to separate the substrate loading/unloading chamber from the film growth chamber. The I-1060 can accommodate a variety of targets up to 60cm in diameter, with the total target area of 170cm2. It has a variable sputter speed of 0.1-30 cm/min, which can be set using a microprocessor system. The table-mounted electrode in the I-1060 provides a ground for the electric field that transfers electrons to the target material, resulting in the plasma formation. The Table-Mounted Electrode (TME) increases the uniformity of the deposited layers and enables the formation of textured films. The unit also features a 4-stage roughing unit, as well as maintenance vacuum valves, a purge machine, three micron filters, two Baffles, and a pumping line. Additionally, a digital controller with a temperature compensation tool allow ease of operation and allows the user to make any necessary adjustments to the sputter parameters. The I-1060 offers precise film thickness control, with a difference in film thickness of less than 10%. There is also a thin-film inspection asset included with the model that ensures quality control. In addition, the I-1060 utilizes a variety of gases such as Argon, Nitrogen, O2, H2, and N2 during sputtering process. Apart from that, advanced remote diagnostics and safety mechanisms enhance the performance of the equipment and protect it from any potential damage.