Used CANON / ANELVA I-1060 SVII #293821353 for sale

CANON / ANELVA I-1060 SVII
ID: 293821353
Wafer Size: 6"
Sputtering systems, 6".
CANON / ANELVA I-1060 SVII is an advanced sputtering equipment used in the manufacturing of electronic components. It is capable of sputtering a wide variety of materials, including Ni, Ti, Mo, W and Si. The system features a high vacuum sputtering chamber and a sputter gun housed in a heavy-duty vacuum chamber. The sputter gun is equipped with an adjustable-height stand and two sputter heads to ensure uniform coating of the substrate. The unit can accommodate a substrate up to 340mm in diameter on its manual rotating platform. CANON I-1060 SVII is controlled by a robust touch screen-based controller and utilizes a variety of sputtering techniques. It is compatible with various sources, including DC, pulsed DC, and high-frequency AC sputtering. The machine has a high deposition rate, good uniformity, low particulate emissions and a wide range of target material compatibility. It also has hot and cold min-max temperature controllers that allow for precise temperature management during operation. ANELVA I-1060 SVII can be operated in both in-line and batch-type sputter processes. In-line processes involve continuous coating of substrates with a single sputter gun, while batch processes involve sputtering multiple substrates in separate batches. For example, a batch process involving 1000 substrates can be completed in approximately 10 minutes. The tool can also be coupled with other equipment such as UV cure, PVD/CVD hard coating, and load locks. I-1060 SVII is made of high-quality corrosion-resistant stainless steel and is equipped with a safety shield and emergency shutoffs to ensure user safety. The asset is serviceable and the filters are easily accessible. Overall, CANON / ANELVA I-1060 SVII is a reliable, high-performance sputtering model that offers an economical and efficient solution for fabricating a variety of electronic components with precise and uniform coatings. Its wide range of sputtering techniques and its batch and in-line processing capabilities makes it an ideal choice for manufacturers looking for a reliable and cost-effective sputtering equipment.
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