Used CANON / ANELVA I-1060 #9148536 for sale
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CANON / ANELVA I-1060 is a high-precision sputtering equipment that is used primarily for thin film deposition in the manufacture of semiconductor and related products. The system is designed to provide uniform and reproducible thin film deposition on a variety of substrates, including semiconductor wafers, glass, and other materials. The unit consists of a vacuum pedestal chamber that houses the substrate holder and the sputtering sources and targets. The vacuum machine is connected to a gas line providing a reactive gas that is introduced into the chamber. To achieve good target to wafer coverage, CANON I-1060 is designed to perform magnetic sputtering. The tool is equipped with a variable power supply that provides controlled power to the magnetron sputter source. The asset also employs stepping motor-driven XY stage to ensure accurate and precise motion of the sample holder for uniform coating of the entire wafer. In addition, ANELVA I-1060 is also equipped with a high-position device that measures individual ionization of the material on the substrate, ensuring uniform thickness of the thin film. To measure the properties of the thin film, the model is also equipped with a spectrometer and/or an ellipsometer to analyze the material properties at different points of the wafer. In addition, the equipment is designed for easy maintenance and is equipped with a variety of safety features. These include features that help to ensure the safety of the operator and the environment. The system also includes an automated fault diagnostic unit for identifying and troubleshooting potential problems. Overall, I-1060 is a well-designed sputtering machine designed to deliver consistent, uniform thin film deposition for a variety of substrates used in the semiconductor industry. The tool includes a variety of features to ensure uniform coating of the entire wafer as well as to analyze the properties of the thin film. It also includes a variety of safety and maintenance features to ensure safe operation and optimal performance.
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