Used CANON / ANELVA I-1060SV2+1 #9197712 for sale

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CANON / ANELVA I-1060SV2+1
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ID: 9197712
PVD System.
CANON I-1060SV2+1 is an advanced sputtering equipment designed for a variety of research and industrial applications. This system is designed for high-rate film deposition with high uniformity through its use of advanced DC magnetron sputtering. It is capable of evaporating and depositing materials from several targets onto substrates with high-speed rates. The unit provides a wide range of substrate sizes and shapes, with geometries from flat substrates to external cylindrical targets, and can process up to two different targets simultaneously. The I-1060SV2+1 machine is designed to provide a high degree of accuracy and uniformity with a quality film structure. It is made up of a four-axes automatic handling robotic tool with a multi-magnetron DC sputtering source. Optimal uniformity is achieved through the use of a variable-field rotating magnetron sputtering asset. This is supplemented by an optional inclined shadow type multi-target planar magnetron sputtering source. The model has a user-friendly Touch Action Control (TAC) Unit. This provides easy operation and allows users to customize their coating specifications. It also provides two monitor display for both data monitoring and data analysis. In addition, the I-1060SV2+1 equipment is capable of running more complex bulk processes, such as reactive sputtering, HiPIMS and multi-component processes. In terms of safety features, the system is equipped with an inert atmosphere chamber and high-vacuum container shields to reduce operator and environment exposure to sputtering gas. It also has interlocks to stop operation in case of out of range conditions. In conclusion, ANELVA I-1060SV2+1 is an advanced DC magnetron sputtering unit designed to provide high-rate film deposition with high uniformity. It features an automated robotic handling machine and user-friendly TAC unit for easy operation. Further, the tool has a selection of safety features to reduce operator and environment exposure to sputtering gas.
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