Used CANON / ANELVA ILC 1012 MK II #9068933 for sale

CANON / ANELVA ILC 1012 MK II
ID: 9068933
Wafer Size: 4"-5"
Sputtering systems, 4"-5".
CANON / ANELVA ILC 1012 MK II is a specialty sputtering equipment designed for use in vacuum coating. The system is equipped with a cold-edge gun consisting of a stationary, multi-magnetron cathode setup as well as a movable, multi-magnetron anode. This combination allows for several advantages over traditional electron beam systems, including a very large throat size, allowing for efficient sputtering of large components. The cold-edge gun also allows for the use of a higher pressure than other electron beam systems. CANON ILC 1012 MK II offers several sputtering chamber configurations, each tailored to meet the specific requirements of a customer's application. The standard configuration, consisting of a 25 cm work chamber, is capable of processing up to four target materials simultaneously. This chamber has a 5 cm access port and is equipped with a 0.6 mbar base pressure and a 0.2 mbar turbo pump. An optional 8 cm process chamber is also available, which features a 0.45 mbar base pressure and a 0.1 mbar turbo pump. The unit is designed with a control unit that manages up to 24 power supplies, enabling precise control of the machine parameters. The centralized control database allows for the storage of multiple recipes for quick and easy changes between applications. Additionally, integrated fault detection software continuously monitors the tool during operation, raising flags to alert the user if any irregularities occur. ANELVA ILC 1012 MK II has a variety of features to make operation and maintenance easier. These include an energy saving mode, which continuously monitors the asset's energy consumption, as well as a user-friendly touch screen interface for setting up and operating the model. Additionally, the equipment is designed to handle high throughput, with a typical cycle time of just 2 minutes. The robust construction and use of high quality materials ensures a long lifespan for the system. This, in combination with the industrial-grade components used throughout the unit, results in an extremely reliable and reproducible process. Overall, ILC 1012 MK II is a reliable and versatile sputtering machine capable of meeting the demands of a wide range of industrial and research applications. With its large throat size, high pressure capability, easy operation and maintenance, as well as energy-saving features, CANON / ANELVA ILC 1012 MK II is an ideal choice for any industry involved in vacuum coating.
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