Used CANON / ANELVA ILC 1013 #9068935 for sale

CANON / ANELVA ILC 1013 is a special type of sputtering equipment used for many different applications. CANON ILC 1013 is a three-chamber system, with three main components: a sputter (source) chamber, a cryo-pump chamber and a deposition chamber. This unit features Ion Laser Components alignment technology (also known as ILC), which provides the ultimate precision when operating small sized features on large substrates. In the sputter chamber, different target materials, such as metals, ceramics, and dielectrics are mounted in cathodic chambers. The chamber is then fed with Ar gas at low pressure (1 mtorr) at which point appropriate target media is subjected to an ion flux from DC magnetrons. By varying the voltage and current levels, the erosion rate and composition of the sputtered material can be controlled. The cryo-pump utilizes liquid nitrogen to support a vacuum of ~10-8 torr. This is done through a combination of the thermal conductivity of the nitrogen, the thermal conductivity of the vacuum walls, and the magnetic fields generated by the cryo-pump. The cryo-pump provides extremely uniform and clean deposition environment. The deposition chamber contains the substrate on which the material is to be deposited. This is done through a continuous transfer mechanism that moves the substrate from one position to the other at a speed predetermined to the thickness of the film. A sputter rate controller is used to vary the deposition rate. In conclusion, ANELVA ILC 1013 is a state of the art sputtering machine, incorporating advanced technologies such as the ILC alignment, which provides the perfect alignment for small features. Its three-chamber architecture contains both a sputter and cryo-pump chamber to ensure uniform and clean deposition. The substrate is specifically positioned in the deposition chamber, and it undergoes a continuous transfer mechanism at a predetermined speed. Thanks to this tool, various applications such as the deposition of metals, ceramics, and dielectrics can be accomplished.