Used CANON / ANELVA ILC-1013 #9269410 for sale

CANON / ANELVA ILC-1013
ID: 9269410
Wafer Size: 5"
Sputtering systems, 5".
CANON / ANELVA ILC-1013 is a DC magnetron sputtering equipment manufactured by CANON Corporation. It is a high-performance sputtering system designed for industrial coating applications. CANON ILC-1013 uses a radio frequency AC power supply to create a high-density plasma arc, which is then used to sputter a variety of materials. The high-density plasma arc enables a much higher ionization efficiency than traditional DC sputtering systems, resulting in superior rates of deposition. ANELVA ILC-1013 features a tightly controlled wafer transfer unit that allows for maximum substrate consistency. The machine's highly efficient design improves the overall uniformity and topography of the final coating. In addition, ILC-1013 boasts precise positioning of the substrate, allowing for unparalleled sputter uniformity and tight control of the substrate temperature. CANON / ANELVA ILC-1013 has various control options, including temperature control, gas flow control, and multi-target operation. CANON ILC-1013 is also equipped with a variety of safety features, including a low voltage monitoring tool, anti-static protection, and substrate clip protection. It has been designed with a heavy-duty stainless steel shell and an interior metal shield, providing ultimate protection and shielding from external sources of contamination. When operating, ANELVA ILC-1013 must be kept in a controlled atmosphere. The asset utilizes both cooling and evacuation systems to regulate temperature and maintain a clean environment. All components are connected by a centralized Vacuum Control Unit (VCU) to ensure an uninterrupted vacuum and process stability. ILC-1013 is an ideal choice for applications that require high quality and consistency in the coating process. It is capable of depositing a wide variety of materials, and can be used for a variety of industrial applications, including medical, automotive, and semiconductor manufacturing. The model's advanced features make it an invaluable tool for all types of depositions.
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