Used CANON ANELVA ILC-1013MK2 #9134664 for sale

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ID: 9134664
Sputtering system AR HE N2 DA 1988 vintage.
CANON ANELVA ILC-1013MK2 is a sputtering equipment manufactured by CANON ANELVA Corporation that uses physical vapor deposition (PVD) to deposit thin films over substrates. This sputtering system is an open-air design, allowing high sputter yields at a great level of efficiency with minimal charging of the deposition chamber. ILC-1013MK2 offers single RF power supply with the world's first 10GHz frequency range, which together with its advanced ion beam technology allows for increased sputtering rates, improved film thickness uniformity, higher film density, fewer pinholes, and lower cost of thin film growth. The simple layout of the unit also enables rapid integration of multiple processes, from N2 treatment to ion purity control or pressure control. CANON ANELVA ILC-1013MK2 is equipped with a DC magnetron source that allows for improved sputtering yields and as well as uniformity over large areas. The machine also features a process control functions, allowing for simple and accurate deposition rate and film thickness control. The Digital Interface allows setting of various parameters in order to ensure a high-accuracy deposition process. The use of Hydraulic Pressure Control Tool further ensures uniform and homogeneous films can be obtained without damaging substrates. The use of advanced mirror restoration technology is ILC-1013MK2 further helps to suppress material buildup that can hinder efficient sputtering on samples. This feature also enables the deposition of high-quality, damage-free films on hard-to-reach parts. CANON ANELVA ILC-1013MK2 has been designed to provide superior performance in the field of PVD. Low pressure operation, quick and easy tool setup, fast process cycle times, and precise film deposition control yields superior results. As such, ILC-1013MK2 has become an increasingly popular choice for many applications in the PVD industry. Many industries rely on the superior results obtained using CANON ANELVA ILC-1013MK2 for their products. With its superior performance, reliability, and ease of use, ILC-1013MK2 is sure to remain an industry leader for many years to come.
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