Used CANON / ANELVA ILC 1015i #9101584 for sale
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ID: 9101584
Wafer Size: 6"
Vintage: 1990
In-line sputtering system, 6"
1990 vintage.
CANON / ANELVA ILC 1015i is a sputtering equipment that is used to sputter metals, ceramics, and polymers onto substrates in a vacuum. The system enables deposition of uniform films over large areas with a high degree of accuracy and control. The 1015i has a patented dual frequency RF power supply module, which enables the unit to operate at both 4 MHz and 13.56 MHz. This makes the machine suitable for use with a variety of materials, from insoluble metals to polymers, and allows for extremely precise control of the deposited film thickness. The 1015i also features automatic discharge control, which can help to eliminate inconsistencies in the deposition process. The sputtering chamber of the 1015i is equipped with an electron beam gun for ionized particles that is vaporize material during the sputtering process. This ensures uniform sputtering, and achieves greater efficiency than mechanical abrasion. The chamber also has two gas injection modules to introduce large gas mixtures in order to control deposition rate, rate of recondensation, and particle deposition characteristics. The sputtering tool also features a high temperature chuck that can be used to heat substrates up to 1000°C. This is useful for substrates made from materials such as ceramics and polymers, which may require high temperatures in order to ensure uniform film deposition. The 1015i also has an advanced control asset that allows users to set operational parameters such as power output levels, deposition speed, and substrate temperature. This allows users to tailor the model to their specific requirements. The 1015i also has a computer programmable interface, allowing users to control the equipment remotely. The system is designed to operate with safety and reliability in mind, and features a range of safety switches and sensors to protect both the unit and the user. It also features an exhaust machine to extract fumes and maintain a safe working environment. Overall, CANON ILC 1015i is an advanced sputtering tool that offers a wide range of features, enabling it to be used with a variety of materials and substrates. Its high accuracy and control, as well as its range of safety features, make it an ideal choice for industrial sputtering applications.
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