Used CANON / ANELVA ILC 1051 #293655450 for sale

CANON / ANELVA ILC 1051
ID: 293655450
Sputtering system Metal: AlSi, Ti, TiN.
CANON / ANELVA ILC 1051 is a sputtering equipment designed to provide high quality single film deposition capability. This system works with a wide range of sputtering targets, allowing it to produce a variety of different kinds of coatings for a variety of applications. The sputtering unit consists of a base unit, a vacuum chamber, a controller, a target holder, and an exhaust machine. The base unit contains an automatic loading and unloading chamber and the necessary equipment to regulate the vacuum within the tool, including a set-point controller and programmable logic controllers. The vacuum is monitored by an ionization gauge and a pressure controller. An inert gas is introduced into the asset through a differential pressure regulator to reduce the pressure. The base unit also contains a power supply and a high frequency generator. The vacuum chamber of the model is made of stainless steel with an anodized aluminium coating for corrosion protection. It is designed to provide a temperature stable environment for film deposition. The vacuum chamber is equipped with a diffusion pump, a turbo-molecular pump, and a general purpose vacuum pump. The process chamber is also equipped with stainless-steel baffles to prevent contamination from outside the process chamber. A target holder is mounted within the chamber and is designed to hold the sputtering target securely in place. The target holder is designed to accept any size sputtering target, including those made from different materials and with different shapes. The target holder is also designed to permit easy positioning of the target within the chamber. The equipment is controlled by a computerized control module which monitors the parameters of the system in order to ensure optimal film deposition. This module also allows the user to adjust the process parameters such as the sputtering pressure, time and power. The unit also features an exhaust machine that removes any excess particles and gases produced during sputtering. CANON ILC 1051 is an efficient tool that can provide high-quality single-film deposition results. This asset is versatile in target materials and shapes and includes features that provide an optimal sputtering environment. These features also make it easier to manage the process parameters and ensure optimal operation.
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