Used CANON / ANELVA ILC 1051 #9257784 for sale

CANON / ANELVA ILC 1051
ID: 9257784
Wafer Size: 6"
Sputtering system, 6".
CANON / ANELVA ILC 1051 sputtering equipment is an electro-magnetron sputtering system designed for thin-film deposition. It is a high-performance, high-precision, automated industrial unit that provides excellent uniformity and repeatability of thin films. CANON ILC 1051 can deposit metals, oxides, and nitrides using two- and three-stage processes. It is suitable for a wide range of materials and can deposit films in a wide range of thicknesses, from very thin layers to thick films. It has a high-purity plasma chamber and an ultra-high vacuum environment with an unmatched contamination control machine. This sputtering tool is controlled by an advanced X-Y table, which allows for precise positioning of the sputtering targets and substrate. ANELVA ILC-1051 has an adjustable z-anais asset, which provides the capability to deposit thin-films on curved surfaces. It is equipped with an advanced cooling model, providing the necessary thermal control for both the sputtering target and the substrate. CANON ILC-1051 has a wide range of components, including tiltable targets, independent mass flow controllers, temperature controllers, and an automated plasma generator that provides the power for the sputtering process. It is also equipped with computer-controlled diagnostic systems for monitoring both the sputtering process and the deposited film. One of the unique features of this sputtering equipment is its advanced laser-based analysis system, which can provide detailed data on the composition and structure of the deposited film. This unit can also be used to measure step heights and layer thicknesses as well as monitor in-situ deposition characteristics. CANON / ANELVA ILC-1051 is highly automated and is easy to use even for users with limited prior experience. It can be configured to meet the needs of the user, and its modular design allows for ease of maintenance and upgrades. It is a reliable machine, and its exceptional performance and quality make it a great choice for research, development, and industrial use.
There are no reviews yet