Used CANON / ANELVA ILC 1060 #9142589 for sale

CANON / ANELVA ILC 1060
ID: 9142589
Wafer Size: 8"
Vintage: 2008
PVD System, 8" 2008 vintage.
CANON / ANELVA ILC 1060 is a high-end radio frequency (RF) magnetron sputtering equipment used for depositing thin protective films or coatings on a variety of objects and surfaces. It is a versatile system that can handle a variety of metals, dielectric, and superconductive films. CANON ILC 1060 is a direct current (DC) or RF sputtering device, with a sputtering power of up to 8 kW. The power supply is equipped with a peak power of 12 kW. The sputter gun controls are handled by a 60-channel DC/RF interlock control unit, capable of providing a uniform distribution of power and sputtered layers. The machine has a pneumatically operated 4'x2'x1' vacuum chamber with an integral 6-target ultrahigh vacuum load-lock tool. The load-lock asset allows large objects up to 4'x2'x1' to be loaded into the chamber quickly and without breaking vacuum. A double-door entry allows for removal of large objects. ANELVA ILC-1060 is equipped with a 120 Hz frequency controller, allowing for efficient deposition of metals, dielectric, or superconductive films on a variety of objects. The maximum operating temperature for ANELVA ILC 1060 is 1000C. ILC-1060 is an extremely versatile sputtering model. The special features enable it to be used for a wide variety of applications. It can be used for depositing thin film or protective coatings on semiconductors, substrates, optoelectronic micro devices, metals, dielectrics, and superconductive materials. Its built-in process control features make it able to do precision etching and sputtering for fine lines and shapes. It is also excellent for creating nanostructured films for applications such as optical components, plasma displays, and micro-lithography. CANON ILC-1060 is also highly durable and reliable. CANON state-of-the-art vacuum technology ensures a consistently clean and uniform deposition of films, with minimal risk of contamination. Plus, the rugged design protects the equipment from environmental concerns such as dust and vibration. ILC 1060 is an incredibly powerful and versatile sputtering system for creating thin protective films and coatings. With its large chamber size, advanced process control features, and reliable operation, CANON / ANELVA ILC-1060 is well-suited for a wide variety of industrial, laboratory, and production applications.
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