Used CANON / ANELVA ILC-1080 #293830306 for sale

CANON / ANELVA ILC-1080
ID: 293830306
Wafer Size: 8"
Vintage: 2003
Sputtering systems, 8" 2003 vintage.
CANON / ANELVA ILC-1080 is a high-performance sputtering equipment designed for precise thin film deposition in semiconductor manufacturing, research and development, and other advanced industrial applications. This system combines innovative technology, advanced automation features, and exceptional versatility to meet the demanding requirements of the thin film deposition process. CANON ILC-1080 sputtering unit is based on a magnetron sputtering method, which involves the bombardment of a target material with high-energy ions to dislodge atoms or molecules for deposition onto a substrate. This process allows for the deposition of high-quality thin films with precise control over the film thickness, composition, and morphology. One of the key features of ANELVA ILC-1080 is its advanced chamber design, which provides a high degree of process compatibility and flexibility. The machine is equipped with multiple deposition sources, enabling the deposition of a wide range of materials such as metals, oxides, nitrides, and more. This flexibility allows users to create complex multilayer structures and tailored thin films for various applications. The tool also features a high-vacuum chamber with a sophisticated pumping asset to create and maintain the high vacuum conditions necessary for thin film deposition. This ensures a clean and stable deposition environment, minimizing impurities and defects in the deposited films. ILC-1080 is equipped with a high-precision substrate holder that provides accurate control over the substrate temperature during deposition. This feature is crucial for growing thin films with precise properties and characteristics, as the substrate temperature can significantly influence the film structure and properties. In addition, the model is equipped with a highly responsive process control equipment that allows users to monitor and adjust process parameters in real-time. This allows for precise control over the deposition process, ensuring reproducibility and consistency in thin film growth. CANON / ANELVA ILC-1080 also features an advanced automation system for seamless operation and process control. The unit can be programmed to run multiple deposition sequences automatically, reducing manual intervention and improving overall process efficiency. Furthermore, the machine is equipped with advanced safety features to protect both the equipment and the operators. Safety interlocks, gas detection systems, and emergency shutdown mechanisms are in place to ensure safe operation and prevent any potential hazards during the deposition process. Overall, CANON ILC-1080 sputtering tool offers a combination of advanced technology, flexibility, precision, and reliability for thin film deposition applications. Whether used in semiconductor manufacturing, research labs, or industrial settings, this asset provides a versatile and high-performance solution for creating tailored thin films with exceptional quality and control.
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