Used CANON / ANELVA SPC-530H #9053827 for sale

CANON / ANELVA SPC-530H Sputtering Equipment is a deposition system designed to deposit thin films of materials, such as metals, onto substrates at a high rate. This unit is ideal for the production of reliable and reproducible thin films for a variety of applications. The flexibility and versatility of CANON SPC-530H make it suitable for a wide variety of research and industry applications. The sputtering machine is composed of a gas source, a power supply, and a vacuum chamber. The gas source supplies the necessary gases for the sputtering process which may include argon, oxygen, nitrogen, and other compounds. The power supply provides an adjustable voltage and current for the sputtering process. Additionally, the power supply is equipped with several different modes and safety features. The vacuum chamber is designed to maintain a metallic wall temperature, an oxygen atmosphere, and a pressure level to protect the film from oxidation and other undesired reactions. ANELVA SPC-530H is able to sputter materials such as copper, aluminum, titanium, stainless steel, and chromium onto substrates with a deposition rate of up to 10 µm/min. Additionally, the tool contains advanced technology for controlling the target current, making it suitable for process optimization of any sputtering job. It can also be easily integrated into existing facilities and is compatible with a variety of substrates. SPC-530H includes an intelligent liquid gas flow control asset with dual gas inlet valves. This model helps prevent oxidation and controls the target pressure while sputtering. Furthermore, the equipment is equipped with a reliable vacuum system, which is capable of maintaining the chamber pressure at or below 0.1 Pa. CANON / ANELVA SPC-530H enjoys user-friendly operation due to its LCD display, six types of voltage display, and USB or GPIB interfaces. This unit is also equipped with advanced diagnostic functions that monitor key process states in real time. In addition, CANON SPC-530H is designed with an advanced filtration machine that provides constant cleanliness. These filters are specifically designed to remove solid particles from the tool and ensure a high-quality sputtering process. The asset also includes a variety of safety mechanisms, which help to protect both operators and products. ANELVA SPC-530H is an advanced, reliable, and versatile thin-film deposition model suitable for a wide variety of applications. Its features allow users to produce consistent high-quality thin films at a high rate. Furthermore, its user-friendly operation, safety mechanisms, and advanced filtration equipment make it an ideal system for both research and industry applications.