Used CANON / ANELVA SPC-530H #9284126 for sale

CANON / ANELVA SPC-530H
ID: 9284126
Sputtering tables 1883-1997 vintage.
CANON / ANELVA SPC-530H is a high-performance sputtering equipment designed for various types of thin-film deposition. The system utilizes an electronically-controlled, high-frequency sputtering process to apply a thin film of material to the substrate. It features a compact, robust design for superior performance in industrial settings such as tool manufacturing and material research. CANON SPC-530H includes a turbo-pumped vacuum chamber with a titanium sputtering target and a high-performance electron beam gun. This allows for extremely fast and precise sputtering of materials, resulting in precise layer thickness and uniformity. The unit is capable of operating in a wide range of applications with its different parameters, such as chamber pressure, substrate temperature, and rotational speeds. ANELVA SPC-530H has a special mechanism that ensures the uniform deposition of the desired layer. This includes a specification-driven controller with a range of tools to adjust parameters for precise control of the film thickness, uniformity, and homogeneity. The machine is equipped with a broad range of substrates, including silicon wafers, die-stacking, and glass discs. SPC-530H also comes with a high-precision stage for reliable substrate loading. The stage has an automated electro-lift feature for manual substrate shifting and positioning, plus a motorized tilt feature allowing for oblique angle coating. CANON / ANELVA SPC-530H also features high-efficiency gas utilization for cost savings and process optimization while reducing pollution and environmental impact. In addition, the tool includes high-precision measurement devices for monitoring sputtering conditions and post-deposition analysis of the film. This ensures reliable process control with minimal energy consumption. CANON SPC-530H is a compact and comprehensive asset for thin-film deposition, offering a wide range of features for improved efficiency, cost savings, and reliability. With its advanced technology and impressive performance, ANELVA SPC-530H is an ideal choice for quality manufacturing in the industry.
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