Used CANON / ANELVA SPF-210H #9382541 for sale

CANON / ANELVA SPF-210H is a dry sputtering equipment designed for thin-film deposition processes. The system is ideal for applications such as the manufacture of optoelectronic components, flat panel displays, and thin-film magnetic heads. This sputtering unit has a 1,000-W single-frequency power amplifier that is capable of sputtering a wide variety of materials. The machine is enclosed with a high-vacuum chamber that is capable of reaching a vacuum level of 10-6 Pa (10-7 Torr). Furthermore, CANON SPF-210H features a fully automated anode assembly, a sample stage that has a 2-axis motion, a radio-frequency (RF) generator, and a plasma monitor. All these components are controlled via a computer interface. The anode assembly is composed of a central rod fixed in the chamber and 4 counter electrodes. It also features a water cooling mechanism that helps in minimizing particle production. The sample stage is mounted on a linear motion guide and has a range of 10 mm x 10 mm. The RF generator consists of an induction coil and an LC coupled circuit. This allows the tool to sputter materials with minimal damage to the substrate or the material being deposited. The plasma monitor is capable of measuring the plasma parameters such as power density, electron temperature and electron number density. This helps the asset to achieve a homogenous deposition profile. In addition, ANELVA SPF-210H is equipped with an Arc Damage Prevention Model (ASDS). This equipment helps in protecting the samples from any possible damage by reducing the arc voltage and preventing high frequency arcs. SPF-210H is a reliable and efficient sputtering system that can be used for various deposition processes. Its automated features and advanced monitoring systems make it easy to use and provide superior results. It is the perfect solution for any thin-film deposition process requirements.