Used CANON / ANELVA SPF-312 #9299212 for sale
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CANON / ANELVA SPF-312 is a multi-function Sputtering Equipment used in thin-film deposition techniques. The system is designed to enable precise and efficient control over thin film deposition processes, including sputtering, evaporation, and reactive sputtering. CANON SPF-312 provides a variety of features that are capable of delivering superior control of the film qualities, including thickness, composition, and uniformity. This sputtering unit features a 300mm x 4-inch diameter circular or square rotating cathode target. The Circular target is heated and cooled for more precise control over film quality and efficiency. The target is surrounded by a two-step magnetic field which is adjustable to enable a homogeneous sputtering rate. The uniform sputtering rate is accomplished through the combination of DC and RF sources that deliver precise and uniform power to the target. The gas employed in ANELVA SPF-312 is selected based on the specific application, and can consist of Ar, Ar/O2, Ar/N2, Ar/O2/H2, or any inert gas with additional additives. The machine also features a full range of adjustable pressure at the substrate, which can range from a few millitorrs to 1 torr. This wide range of adjustable pressures allows for precise control of the pressure during the deposition process. SPF-312 is equipped with a baffle tool that can be adjusted to achieve turbulence for more uniform coverage of the target. The baffle asset is also used to protect against erosion of the target by evaporated material. The model is capable of high-rate deposition rates up to 1,000 Å/hr, with uniformities of 5% or less. This multi-function sputtering equipment is designed to be used in a variety of applications, such as providing coatings on breadboards, solar cells, semiconductors, LCD and OLED display, glass, and various ceramic materials. It can also be used to fabricate metal and other thin-film deposited layers onto substrates using the appropriate plasma activation. The system can also be used to produce multiple layers of thin films while controlling the thickness, composition, and properties of the film. Overall, CANON / ANELVA SPF-312 is a multi-functional sputtering unit with a wide range of features and capabilities that make it well suited for thin-film deposition process. With its adjustable cathode, magnetic field, and adjustable pressure, it is a reliable and robust sputtering machine that can provide superior film quality and uniformity.
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