Used CANON / ANELVA SPF-312W #9031244 for sale

CANON / ANELVA SPF-312W
ID: 9031244
Vintage: 1990
Sputtering system Substrate size: 105 x 105 mm Taget: 75 mm Cryo pump 1990 vintage.
CANON / ANELVA SPF-312W is a multi-functional vacuum sputtering equipment derived from the already popular SPF-312 series. The machine is designed for the production of a wide range of thin film products, such as magnetic recording media, electronic components, architectural decorations, and other special materials, using physical deposition in a vacuum. CANON SPF-312W is designed with a three-axis design and uses a modular architecture that allows for the use of both custom and commercially available components. The system's features include a load-lock, 8-target magnetron, and dual sputter-guns. The magnetron sputter target itself consists of a single body with five "V-" shaped magnets. This design provides superior controllability of the target's movement in the three axes. The sputter tails provide a uniform sputtering profile across the entire target, while the easy-to-operate manual adjustment allows for the selection of the desired sputter power and speed. In addition to sputtering, the machine features a wide variety of additional functions, such as evaporation and e-beam deposition. The flexible input/output device options, including USB and RS-232 interfaces, make the machine highly versatile, allowing for easy integration with other equipment and systems. The efficient vacuum control unit is designed to keep particles under a pressure of less than 10-10 Torr in a low-vacuum environment. Furthermore, the machine is outfitted with auto-calibration for various parameters, including the pressure, and automatic processes for producing films. The intuitive and user-friendly interface on ANELVA SPF-312W is designed for ease of use. The multi-touch display screen gives users quick access to a wide array of parameters and operations, including setting up the tool and controlling the production process. The built-in monitor shows helpful graphical information about production status, pressure, and temperature in real-time. Overall, SPF-312W is a multi-functional sputtering asset designed for the production of even the most challenging film products. Its modular design, user-friendly interface, and extensive process control capabilities make it ideal for use in various applications, including thin film production and coating processes.
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