Used CANON / ANELVA SPF-430 #9122965 for sale

CANON / ANELVA SPF-430 is a multi-function sputtering equipment, developed in collaboration between CANON and Toyota Central Research Lab. It is a highly versatile tool capable of homogeneous and directional coating of materials onto substrates at both ultra-high vacuum and atmospheric pressure, giving it a growing presence in many industries. The chamber of CANON SPF-430 has a capacity of 450 liters and is designed for a variety of sputtering applications such as multi-layer systems, x-ray mirrors and sensors. The chamber itself is of a hybrid design, offering both ultra-high and atmospheric sputter technology. It is constructed of stainless steel with an integrated cryopump and B-DTE pipe for improved heat dissipation. The baseplate, chamber, sputter cathode and other components have been specifically developed and optimized for the best performance in high-vacuum sputter operations. ANELVA SPF-430 is capable of magnetron sputtering, SIMS implantation and thermal evaporation. The system is capable of a long duration of continuous operation, making backside sputtering possible. In addition, it supports two- and three-axis chemical vapor deposition, and the ability to rotate substrates, which is particularly useful for the manufacture of multi-layer systems. The unit also has a unique feature for improved adhesion of the deposited material on the substrate. This is done by applying a high voltage to the target prior to sputtering - known as pre-sputtering - which allows the material to adhere more closely to the substrate surface. SPF-430 includes a computer-controlled data acquisition machine which records and stores the data from each sputtering process. This data is crucial for analyzing the operation of the tool and its overall performance. Furthermore, the asset includes a safety control circuit which monitors the pressure, temperature and other parameters, and shuts down the model when it detects any irregularities. Overall, CANON / ANELVA SPF-430 is an extremely efficient and capable multi-functional sputtering equipment with features suitable for many surface coating applications. Its ability to perform a wide range of operations, coupled with its long duration of continuous operation and robust safety features, make it an ideal choice for many industrial processes.