Used CANON / ANELVA SPF-730 #9031246 for sale
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ID: 9031246
Vintage: 1988
Sputtering system
Substrate size: 7.5 x 7.5 mm
Taget: 8"
Cryo pump
1988 vintage.
CANON / ANELVA SPF-730 is a sputtering equipment which is used for a variety of thin film applications. It is suitable for a wide range of sputtering processes and can be used to deposit materials such as metal and dielectric films. CANON SPF-730 is capable of providing accurate and uniform deposition over a large area, with a high-throughput rate. The system is based on the Multi-Magnetron Sputtering (MMS) technology, which is capable of creating durable and uniform coatings over different areas with an optimized sputtering method. The unit features a unique modular chamber design which helps in achieving better uniformity of the deposited layers. ANELVA SPF-730 has two sets of magnetrons, one at the top and one at the bottom of the chamber. This machine uses cathodic arc evaporation technology to emit energetic ions which are accelerated towards the substrate. This helps in achieving uniform deposits even on large substrates with high deposition efficiency and speed. It has independent control of the magnetron power supplies and also consists of an RF generator which controls both the bottom and top magnets, hence providing uniform deposition of the layers. The tool contains two elevators which helps in manual loading/unloading of substrates. The gas feed asset of SPF-730 contains two independent sources of Argon (Ar) and Oxygen (O2) gases. The two gas sources can be regulated individually to optimize the sputter deposition process. CANON / ANELVA SPF-730 also features a chiller unit which helps in keeping the chamber temperature low during operation. It also contains a control unit which helps in setting various parameters such as process cycles, timing, and gas flow rates. The model also contains a touchscreen operator panel and an LCD display which allows users to monitor the equipment during operation. The system is commonly used for the production of various types of thin film coatings ranging from low-k dielectric layers to high-k dielectric layers, metal films, and compounds. It is suitable for a wide range of applications including semiconductor wafer fabrication, hard disk drive production, display and touch panel production, and sensors. CANON SPF-730 is a highly efficient sputtering unit which is capable of creating uniform and durable thin films for a variety of industrial applications. The machine is easy to operate and provides accurate control of the deposition process.
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