Used CANON / ANELVA SPF-730H #293660536 for sale
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ID: 293660536
Wafer Size: 6"
Vintage: 1996
Sputtering system, 6"
Non-SMIF Type
Main body
Pump
Display
Pump line box
Cables box
Pump cover
Spare parts
(2) Control cabinets
Air pressure: 6-8 kgf/cm²
Water volume:
Main body: 2kgf/cm², 6 L/min
Attached: 2kgf/cm², 5 L/min
Power supply: AC200 V, 60 A, 3-Phase
1996 vintage.
CANON / ANELVA SPF-730H is a state-of-the-art sputtering equipment that is designed to provide researchers with advanced sputtering capabilities in a smaller footprint. This sputtering system combines the efficient DC-controlled sputtering process with advanced power supply technology and ergonomic design that allows easy and intuitive operation. The overall unit ensures improved throughput, accuracy and reproducibility of sputtering results. The sputtering machine consists of two main subsystems - the main body and the magnetic field. The main body houses a sputter source, a vacuum tool, and a computer control asset. The sputter source is made up of two twin magnetrons, allowing the highly efficient DC-controlled magnetron sputtering process to take place. The vacuum model, which consists of a diffusional pump and a turbo-molecular pump, ensures that the sputtering process can take place under a stable and low-pressure vacuum environment. The computer control equipment enables precise control and adjustment of sputtering parameters, including power supply current, voltage, and waveform. The system also features a magnetic field array, which consists of a series of crossed permanent magnets placed around the sputter source. This provides uniform sputtering of the target material as well as directional control, ensuring that the sputtered material is evenly distributed and does not drift away from the substrate. CANON SPF-730H sputtering unit is the ideal choice for sputtering applications requiring high-precision, repeatable and reliable results. With its advanced sputtering process, multiple features, and user-friendly design, this sputtering machine is an excellent choice for laboratories and research institutions looking for a reliable solution for their sputtering needs.
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