Used COMTECH Inline Sputtering System #199743 for sale
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ID: 199743
Wafer Size: 6"
Inline Sputtering System, 6"
(2) Heat stations
(4) 5”x12” sputtering targets.
COMTECH Inline Sputtering Equipment is a revolutionary sputtering technology designed for the in-situ deposition of thin films on flat substrates. This advanced system offers a high uniformity of deposit, high rates of deposition, and a minimum of maintenance. The unit is composed of two basic components: a self-contained deposition chamber and a power supply. The deposition chamber contains the substrate to be coated, a gas/ion source and a magnetron-target assembly. The power supply is used to generate the required voltage for the ion bombardment of the target. The ion bombardment is used to dislodge neutral atoms from the target. These neutral atoms are then deposited onto the substrate. The substrates can be of various sizes and shapes, and can be mounted either vertically or horizontally. The processed area of the substrate is limited solely by the size and shape of the chamber. Inline Sputtering Machine is equipped with several features that aren't found in other systems. These include an advanced high-performance magnetron-target assembly, which incorporates an auto-reversing feature to keep the target free of build-up. The tool also includes a gas injector, which eliminates the need to introduce and then evacuate sputter gas each time a process is run. The asset also offers built-in automated control of process parameters. It features a user-friendly display terminal, which allows users to monitor and adjust process variables such as substrate temperature, target-to-substrate spacing, and sputter gas pressure. COMTECH Inline Sputtering Model is extremely reliable, with minimal downtime and maintenance costs. It also features an optional remote monitoring equipment, for keeping operations efficient and safe. The system has successfully been used for a wide range of processes that require high-performance sputtering. These processes include optical coating, chip packaging, thin-film transistors, and the manufacture of various electronic components. Inline Sputtering Unit is a cost-effective, reliable, and advanced technology that is ideal for the deposition of thin films on flat substrates. It offers a high quality of deposit and a minimum of downtime and maintenance. It is capable of quickly and accurately depositing thin films onto a large variety of different substrates, in a safe and efficient manner.
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