Used CPA / KURDEX 9900 #9035090 for sale
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ID: 9035090
Sputtering system
Cold trap in each chamber
Load lock at each end
Substrate heater chamber
(3) Cathode chambers
Cathode size: 15"
The left side used to have a diffusion pump model #VHS-4, process chamber and the right load lock each had a turbo pump model# TURBOVAC 1000CT
No high vacuum pumps, turbo pumps or diffusion pumps included
Both load locks original vacuum controllers were upgraded some time ago with PLC vacuum controllers
System handles 14 pallets in a load, 12"x12" usable pallet area
Equipped in each load lock a heater enclosure and an omega temperature controller for high temperature cures (=<500C) at high vacuum.
CPA / KURDEX 9900 is a highly versatile physical vapor deposition (PVD) sputtering equipment designed for applications such as thin film deposition, diffusion barrier coating, protective coatings, and optical coatings. It is capable of handling a wide variety of substrates, with up to four sputter targets, magnetron sputtering, or planar sources, allowing sputtering on multiple surfaces simultaneously. This system is equipped with a non-contact, fully-computerized sample stage for precise control of the sampling and deposition parameters. It also includes a PLC (Programmable Logic Controller) for the monitoring and control of all process parameters, and the addition of a high resolution quartz controller allows for precision measurement and precision sputtering. CPA 9900 provides fully automated solutions to a broad range of control and data logging needs in the semiconductor and ferromagnetic coating industries. It is compatible with many software packages, including MATLAB, AutoCAD, and LabView. This unit uses both UHV and high vacuum modes for sputtering, and is capable of using several sources such as high-energy, low-energy, and inert-gas deposition. By using a 63mm circular sputtering target, KURDEX 9900 can enhance surface uniformity and film quality. Additionally, the machine achieves a uniform sputter target surface due to constant sputter depth adjustment capability. The machine has a PLC to facilitate all process parameters, from setting the sputter rate to setting the film thickness. The machine is easy to use and can be operated manually or with an optional auto-tuning software. The auto-tuning software allows for more precise and continual sputter rate adjustment, as well as automatic delivery of oxidation prevention gases. The tool can also record data of each individual step of the cleaning and deposition processes. 9900 is an efficient tool to create highly uniform, defect-free coats with a wide range of compositions, which can improve the long term performance of the product. CPA / KURDEX 9900 sputtering asset proves to be a reliable, accurate, and robust tool for the deposition of thin films.
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