Used CPA / KURDEX 9900 #9115251 for sale

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CPA / KURDEX 9900
Sold
Manufacturer
CPA / KURDEX
Model
9900
ID: 9115251
Sputtering system DRESSLER Cesar 1kW cryo pump (2) Torr 8 Torr 10 Process parameter control ranges: Sputtering pressure: 5 - 30 Microns Conveyor speed: 0.1 - 80 cm.min. D.C Deposition power level: 100 - 9000 watts R.F Deposition power level: 50 - 3000 watts R.F Sputter clean power level: 15 - 1000 watts Substrate heating: Ambient to 350°C Uniformity performance: Etch: ±10% Deposition: R.F Magnetron ±10% D.C Magnetron ±5% Vacuum performance: Ultimate pressure 2 x 10(-7) in 16 hrs 5 x 10(-7) in 30 minutes Rate of rise: 1 x 10(-4) 6 minutes Vacuum tight: Less than 5 x 10(-10) standard atmosphere cc helium/second Utility requirements: 4 Wires delta or 5 wires wye Water temperature: 50 - 75°F (10-24°C) Air: 70 to 100 PSIG (6 to 8 ATU) filtered, 1 CFM Sputtering gas: Typically 5 PSIG (1.3 ATU) argon Power: 208 V, 100 A. 3 phase, 50/60 Hz.
CPA / KURDEX 9900 sputtering equipment is state-of-the-art, high-tech equipment used for thin film deposition. It is an advanced, multi-target, multi-gun, turnkey system designed for sputter coating, chemical vapor deposition, or for specialty applications such as electroplating. CPA 9900 is well-suited for both research and production applications. The unit incorporates multiple targets that permit deposition of a wide range of materials, including metals, oxides, tungsten silicides, and nitrides. The gun configuration supports up to six magnetically levitated or eight quartz crystal sensors. KURDEX 9900 machine features digital power regulation and feedback controls that enable superior target uniformity, high throughput, and low substrate breakdown. The automated process control includes up to 256 points of programmed magnitude ramp/timing for substrate bias, material delivery, process atmosphere, and vacuum performance. Process pressures range from 0.64 to 10-8 Torr. Substrate heating for improved nucleation and adhesion can be operated manually or programmed to temperatures of up to 800 C. 9900 offers an advanced interfacing capability, which includes Ethernet, RS-232, GPIB, and IEEE-488 interfaces. These are accessible through a PC interface for process control, data logging, recipe storage, and remote operation. Additionally, the tool provides an active purge and recirculation manifold for oxygen removal. CPA / KURDEX 9900 sputtering asset is a versatile, reliable, user-friendly model that provides excellent thin film coating solutions. The all-in-one platform is designed and engineered for ease of use, reliability, and throughput. It requires minimal operator training and offers the capabilities to coat a wide range of materials onto different substrates. The sputtering equipment is ideal for a variety of industrial, medical, electronic, and defense applications.
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