Used CPA / KURDEX MRS-3 #9226503 for sale
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ID: 9226503
PVD sputtering system
3 Beam confocal research
Thin film coater
Includes:
SRS RGA 100
OMEGA RDX4sD 4-Channel thermometer
OXFORD E500 Dual temperature monitor
(3) RFPP RF5S RF Power supplies
ADVANCED ENERGY Pinnacle Plus DC Power supply
GRANVILLE PHILLIPS 303 Vacuum process transformer controller
ALLEN BRADLEY Control PC
EDWARDS IPUP2 Vacuum pump
THERMO SCIENTIFIC NESLAB Merlin M33 Recirculating chiller
CTI-CRYOGENICS 8200 Compressor.
CPA / KURDEX MRS-3 sputtering equipment is a high-performance and high-reliability bias sputtering system for a variety of industrial applications. This unit is used for developing and amending coating with a range of materials that are suitable for use in sputtering applications. It has been designed to optimize deposition rates, improve process throughput, and reduce substrate damage. CPA MRS-3 is a three-chamber machine that can accommodate three ceramic target holders. A variety of cathode configurations can be used in the sputter process, including a cluster, an electrostatic chuck, and a magnetic susceptor. The large, effective sputtering area of KURDEX MRS-3 ensures that the quality of the deposited film will be high. The machine also features a variety of monitoring systems to provide process control data for each stage of the deposition process. The target holder has an adjustable suspension mechanism, enabling the user to accurately position the targets. This permits an optimized uniformity of target deposition. The use of a stream of inert gas to evacuate the internal chamber helps control the pressure during the deposition process and prevents the buildup of condensable vapors. MRS-3 is equipped with a variety of automated systems that enable the user to control and monitor the process precisely and accurately. It has a micro-controller for automated substrate loading and unloading, a computer controlled process controller, and a closed-loop tool to regulate the deposition rate. The bias sputtering process enables the user to obtain high-quality, uniform films on a variety of substrates. The asset has been designed to minimize the substrate damage commonly associated with sputtering. It is also capable of maintaining a stable, high sputter rate, ensuring the highest degree of process throughput. CPA / KURDEX MRS-3 is an effective and reliable sputtering model that can be utilized for an array of coating applications. This equipment can provide results that are highly consistent with a range of materials and substrates, making it a reliable and economical choice for sputter deposition.
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