Used EVATEC Radiance #293818719 for sale

Manufacturer
EVATEC
Model
Radiance
ID: 293818719
Wafer Size: 8"
Vintage: 2008
System, 8" 2008 vintage.
EVATEC Radiance is a state-of-the-art sputtering equipment used for various applications. It uses a unique design that combines the benefits of Pulsed DC (PDC) technology with low magnetic field rf-sputter sources. It has five process chambers, which are interconnected to form an inline system that is designed to handle complex processing requirements. The unit contains a dual frequency power supply, low pressure vacuum pump, gas inlet machine, plasma monitoring tool, and four independent PDC sputter sources. The power supply of Radiance is capable of operating at dual frequency, which permits a pulsing mode to precisely adjust the pulse length, power settings, and the required DC offset. The vacuum pump is used to maintain the pressure in the asset and the gas inlet model injects the required gas for sputtering. The plasma monitoring equipment provides real-time measurements of sputter power and the plasma process parameters. The four independent PDC sputter sources are used to uniformly deposit films. The various process chambers of EVATEC Radiance are designed to deliver optimum uniformity and deposition rates for specific applications. The main chamber is supplied with a standard rotating sputter target, which is used to deposit high-quality films. The second chamber contains two fixed targets that are specially designed to produce films with precise deposition profiles. The third and fourth chambers are equipped with three-electrode diode sources that provide high precision adhesion and texture control. The fifth chamber is designed to produce reactive films and has specialized features for plasma activation and improved detachment. Radiance is a reliable sputtering system that meets the needs of various applications. It offers excellent uniformity in film deposition rates, precise adhesion and texture control, precise power adjustment, and advanced gas injection unit. It also provides real-time monitoring of the plasma process parameters as well as the ability to monitor and adjust the power settings of the PDC sources. All these features make EVATEC Radiance a suitable choice for various applications in industries such as automotive, electronics, and medical devices.
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