Used GS / LEYBOLD UNIVEX 350 G #293725240 for sale
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ID: 293725240
Sputtering deposition system
Sputter chamber (RF and DC)
Spin coater
Sluice
(5) GS GLOVEBOX SYSTEMTECHNIK Glovebox
Sputter deposition (RF and DC)
MARIS DC Generator sputter
ADVANCED ENERGY / DRESSLER CESAR 136 E/600W RF Generator sputter
LEYBOLD TurboVac MAG Integra Turbopump sputter
LEYBOLD ScrollVac SC30 D Pump Sputter
ADVANCED ENERGY / DRESSLER VM1000/1500 Platform
Matchbox
AE Vario match network
HEWLETT PACKARD
Laptop sputter
P Pro Book
Control cabinet:
Switch cabinet: 1x 19"
Operator panel
Windows compatible
Pump system
Vapor deposition process
Orifice
Media and connections:
Cooling water
Compressed air supply
Ventilation gas
Vacuum chamber: Stainless steel chamber
Stainless steel: Plates, Removable, chamber walls, Ceiling doors
High-vacuum pump
Pressure measuring range: 1000 to 5E-10 mbar
Chamber ventilation
Pressure safety switch
Overpressure safety
Turbomolecular pump
DN 200 ISO-K Electropneumatic value
Levitated turbomolecular pump
Pumping speed: 1100 l/s
Blocking: Gas, Venting
Scroll vacuum pump
Nominal pumping capacity: 30 m³/h
RF/DC Sputtering:
Clamping targets: 4" (Indirectly water-cooled)
Bond targets: 4" (Directly water-cooled)
Tiltable sputtering head
Electro-pneumatic
Orifice
Chimney
Direct gas
DN 160 ISO-K Flange
(2) Water flow monitor
Process gas inlet
Gas flow regulator
Substrate rotation:
Rotary drive
Motor
Control unit
Single substrate: 150mm x 150mm
Bayonet fitting
Power supply: 400V, 3 Phase, 50Hz, +5%/ -10%, N / PE, 16A.
GS / LEYBOLD UNIVEX 350 G is a sophisticated sputtering equipment designed for advanced thin film deposition processes. Leveraging cutting-edge technology and precision engineering, this system offers unparalleled performance and versatility in a compact footprint. Ideal for research, development, and production applications in the fields of microelectronics, optics, and nanotechnology, GS UNIVEX 350 G delivers high-quality thin films with exceptional uniformity and reproducibility. One of the key features of LEYBOLD UNIVEX 350 G is its modular design, which allows for easy customization and scalability to meet specific process requirements. The unit consists of multiple process chambers, each dedicated to a particular deposition technique, such as sputtering, evaporation, or ion beam deposition. This modular configuration enables users to configure the machine with the desired combination of deposition sources and process control options, ensuring maximum flexibility and efficiency. The sputtering chamber in UNIVEX 350 G is equipped with state-of-the-art magnetron sputtering sources capable of depositing a wide range of materials, including metals, semiconductors, and dielectrics. The tool utilizes advanced plasma generation technology to create a highly ionized plasma, enhancing the sputtering efficiency and film quality. Additionally, GS / LEYBOLD UNIVEX 350 G features a precise gas flow control asset that allows for accurate tuning of the process parameters, ensuring consistent film properties across the substrate surface. For precise control of the deposition process, GS UNIVEX 350 G is equipped with a sophisticated substrate holder that enables uniform film deposition on substrates of various sizes and shapes. The substrate holder can be heated or cooled to control the film growth kinetics and optimize the film properties. Combined with a comprehensive process monitoring and control model, LEYBOLD UNIVEX 350 G allows users to achieve precise control over key process parameters, such as deposition rate, film thickness, and composition. UNIVEX 350 G also features an advanced vacuum equipment that ensures ultra-high vacuum conditions in the process chambers, essential for the deposition of high-quality thin films. The system is equipped with a high-performance turbomolecular pump and a cryogenic pump for rapid evacuation of the chambers and maintaining low base pressure levels during deposition. The vacuum unit is fully automated and can be programmed to follow predefined sequences for pump down, venting, and pressure stabilization, enhancing the machine's throughput and reliability. In terms of user interface and control, GS / LEYBOLD UNIVEX 350 G offers a user-friendly software platform that allows for easy programming and operation of the tool. The intuitive graphical user interface provides access to all asset functions and parameters, enabling users to set up custom deposition recipes, monitor process progress in real-time, and analyze deposition data post-process. Additionally, the model is equipped with advanced safety features and diagnostics tools to ensure smooth operation and prevent downtime due to equipment faults or errors. Overall, GS UNIVEX 350 G is a versatile and reliable sputtering system that offers exceptional performance and flexibility for a wide range of thin film deposition applications. From fundamental research to industrial production, this unit provides the tools and capabilities needed to achieve precise control over thin film properties and meet the most demanding process requirements. With its advanced features and robust design, LEYBOLD UNIVEX 350 G sets a new standard for sputtering systems in the field of thin film deposition.
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