Used HABOR HWT-250 / PSA-15 #293666753 for sale
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ID: 293666753
Vintage: 2002
Sputtering system
10 L
Temperature: 10°C~40°C
2002 vintage.
HABOR HWT-250 / PSA-15 sputtering equipment is designed for the deposition of thin films on substrates. It is suitable for a variety of applications, including semiconductor device fabrication, wafer-level packaging, surface modification, and a variety of research and development projects. The system consists of the main chamber, which is constructed of stainless steel and includes a pumping unit along with a power supply, rotary stage, and control panel. The vacuum is generated by a combination of a roughing pump and turbo molecular pumps, which provide a vacuum of up to 10ˉ¹ mbar. The deposition process is realized by the magnetron rf sputtering source. The target material is heated to the desired temperature and then sputtered onto the substrate. The temperature of the target material can be controlled via a power supply that can be adjusted for different materials. The power supply can be adjusted in terms of the frequency and power output. This allows for precision control when depositing different thin films. The control panel is user-friendly, allowing for automated deposition and multiple recipes to be stored. Additionally, the rotary stage can be used to produce multi-layered films on a single substrate. The uniformity of the deposition is monitored using an OES detector that measures the composition of the film. The machine is equipped with a variety of features that ensure reliable film deposition. It has a tool cooling asset to ensure proper operation during heavy loads. A fast load-lock allows for rapid substrate transfer times. An air bearing model helps ensure the uniform rotation of the substrate and ensures smooth operation. Additionally, the equipment offers traceability to the building material and provides environmental control via parts per billion control. This ensures clean deposition processes and uniformity of the product. Since the system is open to the user, manual processes can be performed when necessary. This includes things such as manually adjusting the power source, monitoring the film growth, or precisely controlling the deposition time. The unit also offers a variety of diagnostics that can be used for troubleshooting, such as tests for surface contamination and oxidation. HWT-250 / PSA-15 sputtering machine is a reliable, user-friendly, and robust tool for deposition of thin films with uniformity and accuracy. It allows for the generation of a variety of thin films for numerous applications. The tool is equipped with all the features needed for high-precision deposition of thin films.
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