Used HITACHI E-1030 #9151980 for sale

HITACHI E-1030 sputtering equipment is a high-performance, versatile system for thin-film deposition. It utilizes the best available sputter deposition technology to provide a cost-effective deposition solution for research and production. The unit offers high angular deposition uniformity, excellent control and repeatability, a low operating cost, and superior deposition rate control - making it perfect for a wide range of deposition applications. E-1030 uses a three-element cross-style machine, consisting of two rotating targets and an electron-beam gun. The tool is powered by a 850W DC magnetron power supply and utilizes a 75mm end-hall magnet. The magnet structure is designed to maintain a high-density plasma in close proximity to the target surfaces, which provides uniform sputtering over a wide spatial area. The control asset provides precise control over the process parameters, such as pressure, gas flow, and plasma power. The vacuum chamber of HITACHI E-1030 is made from stainless steel and has a high-performance ion gauge to maintain a base pressure of 10-7 torr. The model also features top-loading fixtures and sample masks that automate the deposition process and save valuable time. The sample mask capabilities allow for the precise control over deposition thickness, shape, and size. E-1030 is also equipped with WIG heating sources and bottom-entry chillers which enable the equipment to deposit materials at temperatures up to 500°C. This makes the system well-suited for the deposition of both soft and hard films. The unit is also capable of depositing dielectrics and metal films at thicknesses up to 50 micron without perceptible degradation of the film. HITACHI E-1030 offers precision, reliability, and flexibility in one compact package. It is a versatile deposition machine that is suitable for a wide variety of applications, including semiconductors, optics, sensors, MEMS, and energy-related fields. It is a user-friendly tool that is easy to set up and operate, making it a great choice for both research and production environments.