Used INNOTEC VS-24C #190502 for sale

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Manufacturer
INNOTEC
Model
VS-24C
ID: 190502
High vacuum batch vertical sputtering chamber system Includes: Controllers Power supplies Cryopump Targets: Al Cu, Ta, Hf B2.
INNOTEC VS-24C sputtering equipment is a fully integrated and automated device that is used for all processes related to the physical vapor deposition (PVD) of thin film materials. It is an online vacuum deposition solution that has a wide process window, making it suitable for a variety of applications. VS-24C is a multi-source, multi-chamber system equipped with the latest in PVD technology such as advanced deposition controls and diagnostics, including shutterless and nitride deposition capabilities. It also features an intuitive Windows-based graphical user interface (GUI) and a flexible modular design for customized configuration. The unit is designed for the PVD of both dielectric and semiconductor materials. The optimized process window and the closed-loop process control ensure uniform film quality and thickness control. The modular design allows for the addition of up to four separate chambers, giving users flexibility in terms of the scale of deposition and production capabilities. INNOTEC VS-24C is capable of providing high-quality, reliable deposition results and has a specific design for maximum throughput and product yield. Its different source configurations and substrates sizes allow it to accommodate any particular process requirements. The machine performs timed-pulse, circular and segmented rotating sputtering processes, and has a wide range of sputter rates, including an advanced two-source, two-target configuration. It also includes a microprocessor-controlled variable power source, which provides precise control of film deposition parameters. VS-24C is an advanced PVD tool with high degrees of automation and control, allowing users to reduce processing time and increase deposition rates. Its thoughtfully engineered design and comprehensive package of features ensure maximum customer satisfaction.
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